Plasma Enhanced Chemical vapour deposition (PECVD)

High quality SiGe electronic material grown by low energy plasma enhanced chemical vapour deposition

Engineering / Technology / Transmission Electron Microscopy / Atomic Force Microscopy / Molecular beam epitaxy / Physical sciences / Low Energy Buildngs / Plasma Enhanced Chemical vapour deposition (PECVD) / Electrical Properties / Quantum Well / Growth rate / Thin Solid Films / Silicon Germanium / Active Layer / Physical sciences / Low Energy Buildngs / Plasma Enhanced Chemical vapour deposition (PECVD) / Electrical Properties / Quantum Well / Growth rate / Thin Solid Films / Silicon Germanium / Active Layer